Characteristics of HgCdTe CdTe hetero-epitaxial system and mid-wave diodes on 2 inch silicon

被引:6
作者
Dhar, NK
Zanatta, JP
Ferret, P
Million, A
机构
[1] USA, Res Lab, Adelphi, MD 20783 USA
[2] CEA Grenoble, DOPT, LETI, F-38054 Grenoble 9, France
关键词
silicon substrates; moleculer beam epitaxy; photodiodes;
D O I
10.1016/S0022-0248(98)01503-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Two-inch(1 1 2) Si wafers were used to grow HgCdTe/CdTe structures by molecular beam epitaxy. Etch-pit density on CdTe layers in the thickness range 7-8 mu m were typically in the range 3-20 x 10(5) cm(-2). Samples with lower EPD values exhibited very smooth and uniform surface morphology over the entire 2-in wafer. EPD values of HgCdTe layers with a typical thickness of 7 mu m were in the 10(6) cm(-2) range. A 2-in Si wafer consisting of HgCdTe/CdTe structure was processed to fabricate n-on-p mid-wave infrared 34-element linear diode arrays. Photodiodes tested were found to have good electrical characteristics. (C) 1999 Published by Elsevier Science B.V. All rights reserved.
引用
收藏
页码:975 / 979
页数:5
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