Controlled growth of a-/b- and c-axis oriented epitaxial SrBi2Ta2O9 ferroelectric thin films

被引:41
作者
Moon, SE [1 ]
Song, TK
Back, SB
Kwun, SI
Yoon, JG
Lee, JS
机构
[1] Seoul Natl Univ, Dept Phys, Seoul 151742, South Korea
[2] Univ Suwon, Dept Phys, Kyung Gi Do 445724, South Korea
[3] LG Corp Inst Technol, Seoul 137724, South Korea
关键词
D O I
10.1063/1.125163
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of a-/b- and c-axis oriented SrBi2Ta2O9 (SBT) were epitaxially grown on (110) MgO and (100) MgO substrates, respectively, by a rf magnetron sputtering deposition method. The orthorhombic SBT phase was confirmed by electron probe microanalysis and infrared reflectance spectra. The oriented growth was proved by transmission electron microscopy together with x-ray diffraction. The orientation relationship of the a-/b-axis oriented film with the substrates was determined to be SBT[001]//MgO[001] and SBT[010]//MgO[1 (1) over bar 0](SBT[100]//MgO[1 (1) over bar 0]) from electron diffraction patterns. (C) 1999 American Institute of Physics. [S0003-6951(99)02544-9].
引用
收藏
页码:2827 / 2829
页数:3
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