Pseudomorphic InGaAs/In(Ga)P bidimensional electron gas grown by chemical beam epitaxy

被引:4
作者
Carlin, JF
Rudra, A
Ilegems, M
机构
[1] Inst. de Micro-et Optoelectronique, Ecl. Polytech. Federale de Lausanne
关键词
D O I
10.1016/0022-0248(95)01062-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Growth temperatures between 450 and 520 degrees C and V/III ratios of 2-8 were explored to optimize the crystalline quality and the transport properties of compressively strained InxGa1-xAs/InP heterostructures (0.53 < x < 1). 77 K Hall mobilities as high as 118000 cm(2) V-1 s(-1) with n(s) = 1.4 x 10(12) cm(-2) were measured on structures incorporating an In0.8Ga0.2As channel grown with optimized conditions.
引用
收藏
页码:470 / 475
页数:6
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