Thickness dependence of structural, optical and electrical properties of ZnO:Al films prepared on flexible substrates

被引：139

作者：

Hao, XT ^{[1
]}

Ma, J

Zhang, DH

Yang, TL

Ma, HL

Yang, YG

Cheng, CF

Huang, J

机构：

[1] Shandong Univ, Sch Phys & Microelect, Jinan 250100, Shandong, Peoples R China

[2] Shandong Univ Sci & Technol, Dept Phys, Zibo, Shandong, Peoples R China

[3] Shandong Normal Univ, Dept Phys, Jinan 250100, Shandong, Peoples R China

[4] Shandong Univ, Expt Measurement Ctr, Jinan 250100, Shandong, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2001年 / 183卷 / 1-2期

基金：

中国国家自然科学基金;

关键词：

organic substrate; aluminum-doped zinc oxide film; transparent conductive film;

D O I：

10.1016/S0169-4332(01)00582-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The thickness dependence of structural. optical and electrical properties of the ZnO:Al films on polypropylene adipate (PPA) substrates have been studied. It was observed that with an increase in film thickness, the crystallite sizes and the density of the films were increased. the resistivity was decreased. and the average transmittance in the wavelength range of the visible spectrum was also slightly decreased. (C) 2001 Published by Elsevier Science B.V.

引用

页码：137 / 142

页数：6

共 10 条

[1]

Ardakani HK, 1996, THIN SOLID FILMS, V287, P280, DOI 10.1016/S0040-6090(96)08744-5

[2]

BRAGG WL, 1946, CRYSTALLINE STATE, V1, P189

[3] ANOMALOUS OPTICAL ABSORPTION LIMIT IN INSB [J].

BURSTEIN, E .

PHYSICAL REVIEW, 1954, 93 (03) :632-633

[4] Characteristics of spray pyrolytic ZnO thin films [J].

Lee, CH ;

Lin, LY .

APPLIED SURFACE SCIENCE, 1996, 92 :163-166

[5] Characterization and optimization of zinc oxide films by rf magnetron sputtering [J].

Sundaram, KB ;

Khan, A .

THIN SOLID FILMS, 1997, 295 (1-2) :87-91

[6] Transparent conducting ZnO:Al films deposited on organic substrates deposited by r.f. magnetron-sputtering [J].

Yang, TL ;

Zhang, DH ;

Ma, J ;

Ma, HL ;

Chen, Y .

THIN SOLID FILMS, 1998, 326 (1-2) :60-62

[7] Observation of the Burstein-Moss shift in heavily Te-doped In0.5Ga0.5P layers grown by liquid phase epitaxy [J].

Yoon, IT ;

Ji, TS ;

Park, HL .

THIN SOLID FILMS, 1997, 302 (1-2) :270-274

[8] Preparation of transparent conducting ZnO:Al films on polymer substrates by r. f. magnetron sputtering [J].

Zhang, DH ;

Yang, TL ;

Ma, J ;

Wang, QP ;

Gao, RW ;

Ma, HL .

APPLIED SURFACE SCIENCE, 2000, 158 (1-2) :43-48

[9] TRANSPARENT CONDUCTING ZNO FILMS DEPOSITED BY ION-BEAM-ASSISTED REACTIVE DEPOSITION [J].

ZHANG, DH ;

BRODIE, DE .

THIN SOLID FILMS, 1992, 213 (01) :109-112

[10] Electrical and optical properties of Al-doped transparent conducting ZnO films deposited on organic substrate by RF sputtering [J].

Zhang, DH ;

Yang, TL ;

Wang, QP ;

Zhang, DJ .

MATERIALS CHEMISTRY AND PHYSICS, 2001, 68 (1-3) :233-238

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