Tailoring particle arrays by isotropic plasma etching: an approach towards percolated perpendicular media

被引:24
作者
Brombacher, Christoph [1 ]
Saitner, Marc [2 ]
Pfahler, Christian [2 ]
Plettl, Alfred [2 ]
Ziemann, Paul [2 ]
Makarov, Denys [3 ]
Assmann, Daniel [3 ]
Siekman, Martin H. [4 ]
Abelmann, Leon [4 ]
Albrecht, Manfred [1 ]
机构
[1] Tech Univ Chemnitz, Inst Phys, D-09107 Chemnitz, Germany
[2] Univ Ulm, Inst Solid State Phys, D-89069 Ulm, Germany
[3] Univ Konstanz, Dept Phys, D-78457 Constance, Germany
[4] Univ Twente, MESA, Res Inst, NL-7500 AE Enschede, Netherlands
关键词
MAGNETIC NANOSTRUCTURES; PATTERNED MEDIA; FABRICATION; DENSITY; LITHOGRAPHY; SURFACES;
D O I
10.1088/0957-4484/20/10/105304
中图分类号
TB3 [工程材料学];
学科分类号
082905 [生物质能源与材料];
摘要
Plasma etching of densely packed arrays of polystyrene particles leads to arrays of spherical nanostructures with adjustable diameters while keeping the periodicity fixed. A linear dependence between diameter of the particles and etching time was observed for particles down to sizes of sub-50 nm. Subsequent deposition of Co/Pt multilayers with perpendicular magnetic anisotropy onto these patterns leads to an exchange-decoupled, single-domain magnetic nanostructure array surrounded by a continuous magnetic film. The magnetic reversal characteristic of the film-particle system is dominated by domain nucleation and domain wall pinning at the particle locations, creating a percolated perpendicular media system.
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页数:5
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