Theory of ripple topography inhibition in depth profiling with sample rocking

被引：11

作者：

Carter, G

机构：

[1] Department of Physics, University of Salford

来源：

APPLIED PHYSICS LETTERS | 1997年 / 71卷 / 21期

关键词：

D O I：

10.1063/1.119438

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A theory is developed which explains how sample rocking during ion beam sputtering erosion can inhibit ripple formation, observed with monodirectional ion incidence, on radiation amorphisable materials. The model assumes curvature dependent sputtering yield and random ion arrival and sputtering as roughening processes and radiation mediated viscous flow and ballistically driven effective surface diffusion as smoothing processes. (C) 1997 American Institute of Physics.

引用

收藏

页码：3066 / 3068

页数：3

相关论文

共 30 条

[1]

BARKER DJ, 1973, J MATER SCI, V8, P1030

[2] Theory of improved resolution in depth profiling with sample rotation [J].

Bradley, RM ;

Cirlin, EH .

APPLIED PHYSICS LETTERS, 1996, 68 (26) :3722-3724

[3] Dynamic scaling of ion-sputtered rotating surfaces [J].

Bradley, RM .

PHYSICAL REVIEW E, 1996, 54 (06) :6149-6152

[4] THEORY OF RIPPLE TOPOGRAPHY INDUCED BY ION-BOMBARDMENT [J].

BRADLEY, RM ;

HARPER, JME .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2390-2395

[5] Roughening and ripple instabilities on ion-bombarded Si [J].

Carter, G ;

Vishnyakov, V .

PHYSICAL REVIEW B, 1996, 54 (24) :17647-17653

[6] ION-BOMBARDMENT INDUCED RIPPLE TOPOGRAPHY ON AMORPHOUS SOLIDS [J].

CARTER, G ;

NOBES, MJ ;

PATON, F ;

WILLIAMS, JS ;

WHITTON, JL .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 33 (02) :65-73

[7] THE PRODUCTION OF REPETITIVE SURFACE-FEATURES BY OBLIQUE-INCIDENCE ION-BOMBARDMENT [J].

CARTER, G ;

NOBES, MJ ;

KATARDJIEV, IV .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1993, 68 (02) :231-236

[8] A 2ND-ORDER EROSION SLOWNESS THEORY OF THE DEVELOPMENT OF SURFACE-TOPOGRAPHY BY ION-INDUCED SPUTTERING [J].

CARTER, G ;

NOBES, MJ ;

WEBB, RP .

JOURNAL OF MATERIALS SCIENCE, 1981, 16 (08) :2091-2102

[9] RIPPLE PRODUCTION INDUCED BY OBLIQUE-INCIDENCE ION-BOMBARDMENT OF SI [J].

CARTER, G ;

NOBES, MJ ;

CAVE, C ;

ALQADI, N .

VACUUM, 1994, 45 (01) :71-77

[10] THE EFFECTS OF ION SPECIES AND TARGET TEMPERATURE ON TOPOGRAPHY DEVELOPMENT ON ION-BOMBARDED SI [J].

CARTER, G ;

VISHNYAKOV, V ;

MARTYNENKO, YV ;

NOBES, MJ .

JOURNAL OF APPLIED PHYSICS, 1995, 78 (06) :3559-3565