Miniature cantilever-type ultrasonic motor using Pb-free multilayer piezoelectric ceramics

被引:59
作者
Doshida, Yutaka [1 ]
Kishimoto, Sumiaki
Ishii, Keisuke
Kishi, Hiroshi
Tamura, Hideki
Tomikawa, Yoshiro
Hirose, Seiji
机构
[1] Taiyo Yuden Co Ltd, Gunma 3703347, Japan
[2] Yamagata Univ, Yamagata 9928510, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 7B期
关键词
(Sr; Ca)(2)NaNb5O15; PZT; Pb-free; ultrasonic motor; piezoelectrics; multilayer piezoelectric ceramics; cantilever; mode rotation;
D O I
10.1143/JJAP.46.4921
中图分类号
O59 [应用物理学];
学科分类号
摘要
A Miniature cantilever-type ultrasonic motor was fabricated using multilayer piezoelectric ceramics (MLPC) made of (Sr,Ca)(2)NaNb5O15 (SCNN), a Pb-free piezoelectric material, and the electrical driving properties were investigated. The displacement of SCNN-MLPC was 177nm at 100V, which was 10-fold the voltage of MLPC made of Pb(Zr,Ti)O-3-Pb(Ni,Nb)O-3-Pb(Zn,Nb)O-3 (PZT). The ultrasonic motor using SCNN-MLPC started to rotate at 3.8 Vp-p, and showed the following characteristics: a revolution speed of Omega(0) = 517 rpm, a torque of T-o = 1.4 mu N m, and an efficiency of eta = 7% at 13.4 Vp-p. The power consumption, in this case, was 0.3 mW, which is not so high. On the other hand, an ultrasonic motor of the same form made of PZT-MLPC showed Omega(0) = 610rpm, T-o = 1.6 mu Nm, and eta = 9% at 1.9V(p-p), and the same power consumption as the SCNN motor. That is,, it was found that the SCNN motor was not so different from the PZT motor in terms of their characteristics; however, the SCNN motor needed 10 times as high a voltage as the PZT motor in electrical driving. In conclusion, it can be said that we succeeded in realizing a miniature cantilever-type ultrasonic motor using Pb-free MLPC.
引用
收藏
页码:4921 / 4925
页数:5
相关论文
共 27 条
[11]   A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer [J].
Kanda, T ;
Makino, A ;
Ono, T ;
Suzumori, K ;
Morita, T ;
Kurosawa, MK .
SENSORS AND ACTUATORS A-PHYSICAL, 2006, 127 (01) :131-138
[12]   A cylindrical micro-ultrasonic motor using micromachined bulk piezoelectric vibrator with glass case [J].
Kanda, Takefumi ;
Makino, Akira ;
Oomori, Yoshita ;
Suzumori, Koichi .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (5B) :4764-4769
[13]   High-power piezoelectric vibration characteristics of textured SrBi2Nb2O9 ceramics [J].
Kawada, Shinichiro ;
Ogawa, Hirozumi ;
Kimura, Masahiko ;
Shiratsuyu, Kosuke ;
Niimi, Hideaki .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (9B) :7455-7459
[14]   Analysis of tiny piezoelectric ultrasonic linear motor [J].
Ko, Hyun-Phill ;
Lee, Kyong-Jae ;
Yoo, Kyoung-Ho ;
Kang, Chong-Yun ;
Kim, Sangsig ;
Yoon, Seok-Jin .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (5B) :4782-4786
[15]   Piezoelectric rod micro ultrasonic motor with shear-bending modes [J].
Lu, C ;
Zhou, T ;
Chen, Y ;
Lu, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (5B) :4770-4772
[16]   Investigation of ultrasonic motors using thin piezo-ceramics and a metal composite-plate for watches [J].
Miyazawa, O ;
Hashimoto, Y ;
Funasaka, T ;
Furuhata, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9B) :5608-5611
[17]   Design of a cylindrical ultrasonic micromotor to obtain mechanical output [J].
Morita, T ;
Kurosawa, M ;
Higuchi, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (5B) :3251-3254
[18]   Miniature piezoelectric motors [J].
Morita, T .
SENSORS AND ACTUATORS A-PHYSICAL, 2003, 103 (03) :291-300
[19]   A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long stator transducer) [J].
Morita, T ;
Kurosawa, MK ;
Higuchi, T .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 83 (1-3) :225-230
[20]   AN ESTIMATION OF LOAD CHARACTERISTICS OF AN ULTRASONIC MOTOR BY MEASURING TRANSIENT RESPONSES [J].
NAKAMURA, K ;
KUROSAWA, M ;
KUREBAYASHI, H ;
UEHA, S .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1991, 38 (05) :481-485