Cluster ion bombardment on atomically flat Au(111) solid surfaces

被引：31

作者：

Takeuchi, D

Seki, T

Aoki, T

Matsuo, J

Yamada, I

机构：

[1] AIST, Electrotech Lab, ETL, Div Sci Mat, Tsukuba, Ibaraki 305, Japan

[2] Kyoto Univ, Ion Beam Engn Expt Lab, Sakyo Ku, Kyoto 606, Japan

来源：

MATERIALS CHEMISTRY AND PHYSICS | 1998年 / 54卷 / 1-3期

关键词：

clusters; STM; ion traces; craters; molecular dynamics;

D O I：

10.1016/S0254-0584(98)00052-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Energetic cluster ion bombardment shows unique and complicated interactions between constituents of the cluster and atoms of the target surface. Scanning tunneling microscopy (STM) observation is one of the most powerful methods to investigate the cluster ion-solid surface interaction. We have observed crater-shape traces on highly oriented pyrolitic graphite (HOPG) surface bombarded by energetic Ar cluster ions. However, STM images of HOPG surfaces are influenced by special electronic surface states. In this paper, Ar monomer and cluster ions are bombarded on Au( iii) surfaces on mica to observe ion traces by STM. In addition, the relationship between the parameters of cluster ion beams and the features of ion traces are discussed. The STM observation showed that Ar cluster ion bombardment had circular crater-like shapes, and their diameters were proportional to the cubic root of ion energy. These indicate that the kinetic energy of cluster ions is deposited on the surface isotropically. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：76 / 79

页数：4

共 19 条

[1] ELIMINATION OF END-OF-RANGE AND MASK EDGE LATERAL DAMAGE IN GE+ PREAMORPHIZED, B+ IMPLANTED SI [J].