Tip-sample distance feedback control in a scanning evanescent microwave microscope

被引：36

作者：

Duewer, F ^{[1
]}

Gao, C ^{[1
]}

Takeuchi, I ^{[1
]}

Xiang, XD ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA

来源：

APPLIED PHYSICS LETTERS | 1999年 / 74卷 / 18期

关键词：

D O I：

10.1063/1.123940

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have developed a means of tip-sample distance regulation for a scanning evanescent microwave microscope over conductive samples. Changes in resonant frequency and quality factor are measured, where changes in resonant frequency are related to the tip-sample capacitance and changes in quality factor are related to microwave absorption. With the analytical expression of the tip-sample capacitance as a function of tip-sample distance, we can quantitatively regulate the tip-sample separation. We demonstrated simultaneous noncontact imaging of topography and surface resistance with high spatial resolution. (C) 1999 American Institute of Physics. [S0003-6951(99)03518-4].

引用

页码：2696 / 2698

页数：3

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