Study on parylene/SiO2 composite films for protection of KDP crystals

被引：7

作者：

Chao, Xu ^{[1
]}

Jun, Shen ^{[1
]}

Bin, Zhou ^{[1
]}

Guangming, Wu ^{[1
]}

Xiang, Xu ^{[1
]}

机构：

[1] Tongji Univ, Pohl Inst Solid State Phys, Shanghai 200092, Peoples R China

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 2008年 / 45卷 / 03期

基金：

中国国家自然科学基金;

关键词：

poly(p-xylylene); SiO2 anti-reflective coating; anti-moisture films; KDP crystals;

D O I：

10.1007/s10971-008-1679-2

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, parylene/SiO2 composite films were reported to protect KDP crystals, indispensable cells in ICF experiments, from moisture. FTIR, UV-NIR spectra and XPS were used to analyze the properties of films. Laser damage threshold of films was also measured. With porous silica coating on surface of parylene film, the transmittance of dual layers can be raised to more than 91%. KDP crystals with poly(p-xylylene)/SiO2 coating could work well in ambient atmosphere for more than half a year.

引用

页码：319 / 324

页数：6

共 11 条

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