Scanning tunneling microscopy study of Si growth on a Si(111)root 3x root 3-B surface

被引:29
作者
Zotov, AV
Kulakov, MA
Bullemer, B
Eisele, I
机构
[1] UNIV MUNICH,INST PHYS,D-85577 MUNICH,GERMANY
[2] INST AUTOMAT & CONTROL PROC,VLADIVOSTOK 690041,RUSSIA
来源
PHYSICAL REVIEW B | 1996年 / 53卷 / 19期
关键词
D O I
10.1103/PhysRevB.53.12902
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Scanning tunneling microscopy is used to study the growth of Si on a Si(111) root 3x root 3-B surface at Si coverages from submonolayer range up to a few monolayers and in an temperature range from 20 to 600 degrees C. Already at room temperature the deposited Si atoms are very mobile on the Si(111) root 3x root 3-B surface. As a result, the amorphous Si islands are formed, leaving the root 3x root 3 reconstruction between islands intact. The dangling bond ''bright'' adatoms of the Si(111) root 3x root 3-B surface were found to be preferential sites for island nucleation. At temperatures of Si(111) epitaxy (greater than or equal to 400 degrees C) Si islands grow amorphously up to a certain critical size and then ''crystallize'' to form epitaxial islands. The structure on top of epitaxial Si islands is always root 3x root 3, which suggests B segregation to the surface. The island shape (random below 600 degrees C) is considered to be governed by the structure and properties of the Si(111) root 3x root 3-B surface.
引用
收藏
页码:12902 / 12906
页数:5
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