Control of structures of deposited polymer films by ablation laser wavelength: Polyacrylonitrile at 308, 248, and 193 nm

被引:42
作者
Nishio, S [1 ]
Chiba, T [1 ]
MAtsuzaki, A [1 ]
Sato, H [1 ]
机构
[1] INST MOLEC SCI,OKAZAKI,AICHI 444,JAPAN
关键词
D O I
10.1063/1.361522
中图分类号
O59 [应用物理学];
学科分类号
摘要
Extensive control of structures of deposited polymer films has been realized when the films have been prepared on a quartz or KBr substrate by laser ablation of polyacrylonitrile (PAN) with 308 (XeCl), 248 (KrF), and 193 nm (ArF) excimer laser beams, as revealed by scanning electron microscopy, infrared spectroscopy, x-ray photoelectron spectroscopy, electron spin resonance, and x-ray diffraction measurements. The original structure of PAN is essentially retained for the films deposited by ablation at 308 nm. Deformation and elimination of nitrile groups occur for the films prepared by ablation at 248 and 193 nm, respectively. Furthermore, a remarkable power-dependent structural change has been observed at 248 nm; an increase in the laser power has led to ring closure of nitrile groups, resulting in the development of pi-conjugated systems. In addition, a rather high electric conductivity on the order of 10(-2)S cm(-1) has been given to the films deposited by ablation at 248 and 193 nm on reirradiation with lower-power excimer laser beams of 308 nm. (C) 1996 American Institute of Physics.
引用
收藏
页码:7198 / 7204
页数:7
相关论文
共 38 条
[1]  
AIRAPETYANTS AV, 1963, J POLYM SCI C, V4, P1327
[2]   DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].
ANDREW, JE ;
DYER, PE ;
FORSTER, D ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719
[3]   CHEMICAL AND PHYSICAL-PROPERTIES OF LASER-TREATED POLY(ETHYLENETEREPHTHALATE) [J].
BAHNERS, T ;
KNITTEL, D ;
HILLENKAMP, F ;
BAHR, U ;
BENNDORF, C ;
SCHOLLMEYER, E .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (04) :1854-1858
[4]   DEPOSITION OF AMORPHOUS FLUOROPOLYMERS THIN-FILMS BY LASER ABLATION [J].
BLANCHET, GB .
APPLIED PHYSICS LETTERS, 1993, 62 (05) :479-481
[5]   DEPOSITION OF POLYTETRAFLUOROETHYLENE FILMS BY LASER ABLATION [J].
BLANCHET, GB ;
SHAH, SI .
APPLIED PHYSICS LETTERS, 1993, 62 (09) :1026-1028
[6]   LASER-ABLATION AND THE PRODUCTION OF POLYMER-FILMS [J].
BLANCHET, GB ;
FINCHER, CR ;
JACKSON, CL ;
SHAH, SI ;
GARDNER, KH .
SCIENCE, 1993, 262 (5134) :719-721
[7]   SUBMICRON PERIODIC STRUCTURES PRODUCED ON POLYMER SURFACES WITH POLARIZED EXCIMER LASER ULTRAVIOLET-RADIATION [J].
BOLLE, M ;
LAZARE, S ;
LEBLANC, M ;
WILMES, A .
APPLIED PHYSICS LETTERS, 1992, 60 (06) :674-676
[8]   EXCIMER LASER ETCHING OF POLYIMIDE [J].
BRANNON, JH ;
LANKARD, JR ;
BAISE, AI ;
BURNS, F ;
KAUFMAN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043
[9]   FOURIER-TRANSFORM INFRARED STUDIES ON THERMAL-DEGRADATION OF POLYACRYLONITRILE [J].
COLEMAN, MM ;
PETCAVICH, RJ .
JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS, 1978, 16 (05) :821-832
[10]  
GEIDERIKH M, 1961, J POLYM SCI, V54, P621