共 19 条
[12]
POLLA DL, 1996, MRS BULL, V21, P759
[18]
Novel Pb(Ti, Zr)O3(PZT) crystallization technique using flash lamp for ferroelectric RAM (FeRAM) embedded LSIs and one transistor type FeRAM devices
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
2002, 41 (4B)
:2630-2634