Selectivity enhancement of a WO3/TiO2 gas sensor by the use of a four-point electrode structure

被引:19
作者
Gerlich, A
Kornely, S
Fleischer, A
Meixner, H
Kassing, R
机构
[1] Siemens AG, Corp Technol, D-81739 Munich, Germany
[2] Univ Gesamthsch Kassel, Phys Tech Inst, D-34109 Kassel, Germany
关键词
four-point structure; tungsten oxide; titanium oxide; selectivity enhancement; air quality sensor;
D O I
10.1016/S0925-4005(03)00187-4
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A new electrode structure with two additional middle-electrodes running in-between the interdigitated electrodes, is presented. With this structure, the voltage drops at these middle-electrodes are measured as well as the conductivity of a screen printed n-type WO3/TiO2, mixed oxide layer. The gas-sensing properties to NOx, CHx and CO are determined at 300 degreesC. It is shown that with this four-point structure, different sensor regions, namely the pure semiconducting layer and the interface electrode/semiconductor, can be separated and different gas-sensing properties can be determined for this regions. Additionally, by evaluating the signals at the middle-electrodes, single gases in gas mixtures can be detected and discriminated. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:503 / 508
页数:6
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