Thin film growth on nanostructured polymer webs for anti-reflection purposes

被引:5
作者
Munzert, P. [1 ]
Schulz, U. [1 ]
Kaiser, N. [1 ]
Schoenberger, W. [2 ]
Fahland, M. [3 ]
机构
[1] Fraunhofer Inst Appl Opt & Precis Engn, D-07745 Jena, Germany
[2] Tech Univ Dresden, Dept Elect & Comp Engn, D-01062 Dresden, Germany
[3] Fraunhofer Inst Electron Beam & Plasma Technol, D-01277 Dresden, Germany
关键词
Nanostructure; Optical coating; Plasma treatment; Polymer; Anti-reflection;
D O I
10.1016/j.surfcoat.2011.01.010
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Nanostructures offer an alternative way of imparting anti-reflection properties to a surface, but most of the structuring techniques are quite complex and cost-intensive. At the Fraunhofer-IOF in Jena, a method for generating nanostructures on a PMMA surface by using a simple plasma-etching procedure has been developed. In the work described herein, we have attempted to transfer this technique to polymer webs in a roll-to-roll process with the intention of creating a highly effective and low-cost anti-reflection surface. Important for prospective applications of the webs is the protection of the nanostructured polymer surface by a thin glass-like layer. The challenge of this task is to enhance the mechanical stability without deteriorating the anti-reflection effect at the same time. First experiments involving the deposition of SiO2 layers in a thickness range from 15 nm to 45 nm on nanostructured TAC samples showed noticeable differences in the spectral reflectances obtained. While for "bump-like" nanostructures the average residual reflection could be minimized with increasing thickness of the protective layers, the reflectance curves of "sponge-like" samples were simply shifted to longer wavelengths. This could be rationalized in terms of different growth patterns of the SiO2 coatings, which were identified from SEM micrographs. While on a "bump-like" nanostructure the film enwraps the bumps and boosts the material/air fill factor in a suitable range for anti-reflection, a coating on a "sponge-like" structure closes the voids and grows predominantly on top of the structure. On such a "sponge"-type structure, the abrasion resistance can be significantly increased, almost reaching the value of the untreated surface. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:S498 / S501
页数:4
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