Characteristics of W- and Ti-doped VO2 thin films prepared by sol-gel method

被引:52
作者
Chae, B. G. [1 ]
Kim, H. T. [1 ]
Yun, S. J. [1 ]
机构
[1] Elect & Telecommun Res Inst, Basic Res Lab, Taejon 305350, South Korea
关键词
D O I
10.1149/1.2903208
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
W- and Ti-doped VO(2) thin films were deposited onto sapphire by the sol-gel method. Both films were grown with (020)-preferred direction. Doping of W had a great effect on the transition behaviors. A 1.2 atom % W-doped VO(2) film showed a largely reduced resistance in the insulator state and decreased the transition temperature to 313 K. However, Ti-doped VO(2) film had a little change of the transition temperature, and it was 350 K, even for the 20 atom % Ti doping. The resistance in the metal state was very large, which means a markedly small change of the resistance at the transition temperature. Further study is required for understanding the effects of doping VO(2) film with metal ions.
引用
收藏
页码:D53 / D55
页数:3
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