Angular distributions of Ni and Ti atoms sputtered from a NiTi alloy under He+ and Ar+ ion bombardment

The angular distributions of sputtered components were measured for NiTi polycrystalline alloy under 9 keV Ar+ and He+ ions bombardments with various fluences in ultrahigh vacuum. Combination of Rutherford Backscattering Spectrometry (RBS) and Auger Electron Spectrometry (AES) techniques allowed us to observe enhanced concentration of Ni over a layer with thickness comparable to a primary He+ ions penetration depth due to selective sputtering of Ti atoms and radiation-induced diffusion processes. A preferential emission of Ni atoms towards the surface normal was observed during bombardment by both He+ and Ar+ ions. More forward-peaked "over-cosine" angular distributions of sputtered Ni in comparison with those for Ti atoms have been measured. Nonstoichiometric sputtering of NiTi alloy dependent on emission angle was observed for bombardment fluence of He+ well below that needed for the steady-state altered layer formation. To explain the peculiarities of NiTi sputtering, an interpretation is discussed in terms of sputtering due to backscattered He+ ions. (C) 1998 Elsevier Science B.V.