Effect of self-patterned Si1-xGex template layer on the structural and optical properties of Ge dots

被引:7
作者
Ismail, B [1 ]
Descoins, M
Ronda, A
Bassani, F
Brémond, G
Maaref, H
Berbezier, I
机构
[1] Fac Sci, Lab Phys Semicond & Composants Elect, Monastir 5000, Tunisia
[2] CRMCN, CNRS, F-13228 Marseille, France
[3] Inst Natl Sci Appl, LPM, F-69621 Villeurbanne, France
[4] CRMCN, CNRS, F-13228 Marseille, France
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2005年 / 23卷 / 01期
关键词
D O I
10.1116/1.1844051
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report the structural and optical properties of Ge dots grown on self-patterned Si1-xGex template layers. The study focuses on the influence of a Si1-xGex template layer on Ge dot properties. Surface morphology is analyzed by atomic force microscopy and cross-sectional transmission electron microscopy. Optical properties are investigated by photoluminescence (PL) and Raman spectroscopy. The results show that increasing x in the Si1-xGex template layer from 0.3 to 0.5 induces a significant decrease of Ge island size and a dramatic reduction of Ge/Si intermixing. The lower intermixing is evidenced by the larger Ge-Ge/Si-Ge integrated intensity ratio of Raman peaks and by the island-related PL redshift. Moreover, the island-related PL signal is found to be highly dependent on the power excitation and temperature: from 10 to 30 K, an anomalous increase of islands' PL was accompanied by a rapid decrease of the wetting layer PL. Such a behavior results from the transfer of photon-induced carriers in the wetting layer into the neighboring islands. Significant PL signal at 1.55 mum was obtained up to room temperature for Si(001)/Si0.5Ge0.5/7 monolayer Ge structures. (C) 2005 American Vacuum. Society.
引用
收藏
页码:242 / 246
页数:5
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