Low frequency noise and fluctuations in advanced CMOS devices

A review of recent results concerning the low frequency noise in modem CMOS devices is given. The approaches such as the carrier number and the Hooge mobility fluctuations used for the analysis of the noise sources are presented and illustrated through experimental data obtained on advanced CMOS generations. The application of low frequency noise measurements as a characterization tool for large area MOS devices,is also discussed. The main physical characteristics of random telegraph signals (RTS) observed in small area MOS transistors are reviewed. The impact of scaling down on the low frequency noise and RTS fluctuations in CMOS silicon devices is also addressed. Experimental. results obtained on 0.35-0.12 mum CMOS technologies are used to predicting the trends for the noise in future CMOS technologies e.g. 0.1 mum and beyond. The formulation of thermal noise underlying the low frequency IN or RTS fluctuations in MOSFETs is also recalled for completeness.