Step structure and ordering in Te-doped GaInP

被引:21
作者
Lee, SH [1 ]
Hsu, TC [1 ]
Stringfellow, GB [1 ]
机构
[1] Univ Utah, Dept Mat Sci & Engn, Salt Lake City, UT 84112 USA
关键词
D O I
10.1063/1.368372
中图分类号
O59 [应用物理学];
学科分类号
摘要
The step structure and CuPt ordering in GaInP layers grown by organometallic vapor phase epitaxy on singular GaAs substrates have been investigated as a function of Te (DETe) doping using atomic force microscopy, and electrical and optical properties measurements. The degree of order decreases for Te concentrations of >10(18) cm(-3). It is estimated from the photoluminescence peak energy to be approximately 0.5 for undoped layers and the layers are completely disordered at sufficiently high Te doping levels. The bandgap energy is changed by 110 meV as the Te doping level increases from 10(17) to 10(18) cm(-3). The step structure also changes markedly over the range of eloping that produces disordering, from a mixture of monolayer and bilayer steps for undoped layers to solely monolayer steps for electron concentrations exceeding 10(18) cm(-3). For growth at 670 degrees C, the spacing between [(1) over bar 10] steps increased by over an order of magnitude as the doping level was changed over the range investigated, while the step spacing between [110] steps increased only slightly. In general, Te doping significantly improves the surface morphology viewed using atomic force microscopy. The degree of order and surface structure are changed at exactly the same doping concentration. This suggests that the disordering may be controlled by the fast propagation of [110] steps due to kinetic effects at the step edges. A qualitative model is presented to explain these effects. (C) 1998 American Institute of Physics. [S0021-8979(98)02017-9].
引用
收藏
页码:2618 / 2623
页数:6
相关论文
共 28 条
[1]   ANISOTROPIC LATERAL GROWTH IN GAAS MOCVD LAYERS ON (001) SUBSTRATES [J].
ASAI, H .
JOURNAL OF CRYSTAL GROWTH, 1987, 80 (02) :425-433
[2]   Effect of growth rate on step structure and ordering in GaInP [J].
Chun, YS ;
Lee, SH ;
Ho, IH ;
Stringfellow, GB .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (02) :646-649
[3]   Effect of growth parameters on step structure and ordering in GaInP [J].
Chun, YS ;
Lee, SH ;
Ho, IH ;
Stringfellow, GB .
JOURNAL OF CRYSTAL GROWTH, 1997, 174 (1-4) :585-592
[4]   Effects of V/III ratio on ordering in GaInP: Atomic scale mechanisms [J].
Chun, YS ;
Murata, H ;
Hsu, TC ;
Ho, IH ;
Su, LC ;
Hosokawa, Y ;
Stringfellow, GB .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (09) :6900-6906
[5]   DISORDERING OF THE ORDERED STRUCTURE IN METALORGANIC CHEMICAL VAPOR-DEPOSITION GROWN GA0.5IN0.5P ON (001) GAAS SUBSTRATES BY ZINC DIFFUSION [J].
DABKOWSKI, FP ;
GAVRILOVIC, P ;
MEEHAN, K ;
STUTIUS, W ;
WILLIAMS, JE ;
SHAHID, MA ;
MAHAJAN, S .
APPLIED PHYSICS LETTERS, 1988, 52 (25) :2142-2144
[6]   DISORDERING OF THE ORDERED STRUCTURE IN MOCVD-GROWN GAINP AND ALGAINP BY IMPURITY DIFFUSION AND THERMAL ANNEALING [J].
GAVRILOVIC, P ;
DABKOWSKI, FP ;
MEEHAN, K ;
WILLIAMS, JE ;
STUTIUS, W ;
HSIEH, KC ;
HOLONYAK, N ;
SHAHID, MA ;
MAHAJAN, S .
JOURNAL OF CRYSTAL GROWTH, 1988, 93 (1-4) :426-433
[7]   SILICON AND SELENIUM DOPING EFFECTS ON BAND-GAP ENERGY AND SUBLATTICE ORDERING IN GA0.5IN0.5P GROWN BY METALORGANIC VAPOR-PHASE EPITAXY [J].
GOMYO, A ;
HOTTA, H ;
HINO, I ;
KAWATA, S ;
KOBAYASHI, K ;
SUZUKI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (08) :L1330-L1333
[8]   TRANSMISSION ELECTRON-MICROSCOPY STUDY OF THE EFFECT OF SELENIUM DOPING ON THE ORDERING OF GAINP2 [J].
GORAL, JP ;
KURTZ, SR ;
OLSON, JM ;
KIBBLER, A .
JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (01) :95-99
[9]   SURFACE-DIFFUSION AND STEP-BUNCHING MECHANISMS OF METALORGANIC VAPOR-PHASE EPITAXY STUDIED BY HIGH-VACUUM SCANNING-TUNNELING-MICROSCOPY [J].
KASU, M ;
KOBAYASHI, N .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (05) :3026-3035
[10]   ABINITIO THEORY OF POLAR SEMICONDUCTOR SURFACES .1. METHODOLOGY AND THE (2X2) RECONSTRUCTIONS OF GAAS(111) [J].
KAXIRAS, E ;
BARYAM, Y ;
JOANNOPOULOS, JD ;
PANDEY, KC .
PHYSICAL REVIEW B, 1987, 35 (18) :9625-9635