共 28 条
Optical properties of Al-doped ZnO thin films by ellipsometry
被引:143
作者:

Li, Qing Hua
论文数: 0 引用数: 0
h-index: 0
机构:
Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China
Shenzhen Key Lab Special Funct Mat, Shenzhen 518060, Peoples R China Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China

Zhu, Deliang
论文数: 0 引用数: 0
h-index: 0
机构:
Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China
Shenzhen Key Lab Special Funct Mat, Shenzhen 518060, Peoples R China Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China

Liu, Wenjun
论文数: 0 引用数: 0
h-index: 0
机构:
Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China
Shenzhen Key Lab Special Funct Mat, Shenzhen 518060, Peoples R China Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China

Liu, Yi
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h-index: 0
机构:
Shenzhen Univ, Coll Phys, Shenzhen 518060, Peoples R China Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China

Ma, Xiao Cui
论文数: 0 引用数: 0
h-index: 0
机构:
Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China
Shenzhen Key Lab Special Funct Mat, Shenzhen 518060, Peoples R China Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China
机构:
[1] Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen 518060, Peoples R China
[2] Shenzhen Key Lab Special Funct Mat, Shenzhen 518060, Peoples R China
[3] Shenzhen Univ, Coll Phys, Shenzhen 518060, Peoples R China
关键词:
Al-doped ZnO (AZO);
optical properties;
ellipsometry;
D O I:
10.1016/j.apsusc.2007.09.104
中图分类号:
O64 [物理化学(理论化学)、化学物理学];
学科分类号:
070304 ;
081704 ;
摘要:
Al-doped ZnO thin films (AZO) were prepared on Si (100) substrates by using sub-molecule doping technique. The Al content was controlled by varying Al sputtering time. The as-prepared samples were annealed in vacuum chamber at 800 degrees C for 30 min. From the XRD observations, it is found that all films exhibit only the (002) peak, suggesting that they have c-axis preferred orientation. The average transmittance of the visible light is above 80%. Spectroscopic ellipsometry was used to extract the optical constants of the films. The absorption coefficient and the energy gap were then calculated. The results show that the absorption edge initially blue-shifts and then red-shifts with increase of Al content. (C) 2008 Published by Elsevier B.V.
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页码:2922 / 2926
页数:5
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- [1] Infrared dielectric functions and crystal orientation of a-plane ZnO thin films on r-plane sapphire determined by generalized ellipsometry[J]. THIN SOLID FILMS, 2004, 455 : 161 - 166Bundesmann, C论文数: 0 引用数: 0 h-index: 0机构: Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, Germany Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, GermanyAshkenov, N论文数: 0 引用数: 0 h-index: 0机构: Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, Germany Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, GermanySchubert, M论文数: 0 引用数: 0 h-index: 0机构: Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, Germany Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, GermanyRahm, A论文数: 0 引用数: 0 h-index: 0机构: Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, Germany Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, GermanyWenckstern, HV论文数: 0 引用数: 0 h-index: 0机构: Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, Germany Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, GermanyKaidashev, EM论文数: 0 引用数: 0 h-index: 0机构: Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, Germany Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, GermanyLorenz, M论文数: 0 引用数: 0 h-index: 0机构: Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, Germany Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, GermanyGrundmann, M论文数: 0 引用数: 0 h-index: 0机构: Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, Germany Univ Leipzig, Inst Expt Phys 2, Fak Phys & Geowissensch, D-04103 Leipzig, Germany
- [2] Surface characterization of transparent conductive oxide Al-doped ZnO films[J]. JOURNAL OF CRYSTAL GROWTH, 2000, 220 (03) : 254 - 262Chen, M论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R ChinaPei, ZL论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R ChinaSun, C论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R ChinaWen, LS论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R ChinaWang, X论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China
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- [4] Determination of optical constants of Si/ZnO polycrystalline nanocomposites by spectroscopic ellipsometry[J]. JOURNAL OF MATERIALS RESEARCH, 2001, 16 (12) : 3554 - 3559García-Serrano, J论文数: 0 引用数: 0 h-index: 0机构: Univ Autonoma Puebla, Inst Fis, Puebla 72570, MexicoKoshizaki, N论文数: 0 引用数: 0 h-index: 0机构: Univ Autonoma Puebla, Inst Fis, Puebla 72570, MexicoSasaki, T论文数: 0 引用数: 0 h-index: 0机构: Univ Autonoma Puebla, Inst Fis, Puebla 72570, MexicoMartínez-Montes, G论文数: 0 引用数: 0 h-index: 0机构: Univ Autonoma Puebla, Inst Fis, Puebla 72570, MexicoPal, U论文数: 0 引用数: 0 h-index: 0机构: Univ Autonoma Puebla, Inst Fis, Puebla 72570, Mexico
- [5] High conductivity and transparent ZnO:Al films prepared at low temperature by DC and MF magnetron sputtering[J]. THIN SOLID FILMS, 2006, 515 (02) : 640 - 643Guillen, C.论文数: 0 引用数: 0 h-index: 0机构: CIEMAT, Renewable Energy Div, E-28040 Madrid, Spain CIEMAT, Renewable Energy Div, E-28040 Madrid, SpainHerrero, J.论文数: 0 引用数: 0 h-index: 0机构: CIEMAT, Renewable Energy Div, E-28040 Madrid, Spain CIEMAT, Renewable Energy Div, E-28040 Madrid, Spain
- [6] Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering[J]. APPLIED SURFACE SCIENCE, 2003, 207 (1-4) : 341 - 350Hong, RJ论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, GermanyJiang, X论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, GermanySzyszka, B论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, GermanySittinger, V论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, GermanyPflug, A论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany
- [7] TEXTURED ALUMINUM-DOPED ZINC-OXIDE THIN-FILMS FROM ATMOSPHERIC-PRESSURE CHEMICAL-VAPOR DEPOSITION[J]. JOURNAL OF APPLIED PHYSICS, 1992, 71 (02) : 880 - 890HU, JH论文数: 0 引用数: 0 h-index: 0机构: Department of Chemistry, Harvard University, CambridgeGORDON, RG论文数: 0 引用数: 0 h-index: 0机构: Department of Chemistry, Harvard University, Cambridge
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- [10] Effects of substrate temperature on the properties of heavily Al-doped ZnO films by simultaneous r.f. and d.c. magnetron sputtering[J]. SURFACE & COATINGS TECHNOLOGY, 2005, 190 (01) : 39 - 47Lin, SS论文数: 0 引用数: 0 h-index: 0机构: Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, TaiwanHuang, JL论文数: 0 引用数: 0 h-index: 0机构: Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, Taiwan Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, TaiwanSajgalik, P论文数: 0 引用数: 0 h-index: 0机构: Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, Taiwan