Abnormal Subthreshold Leakage Current at High Temperature in InGaZnO Thin-Film Transistors

被引:11
作者
Chang, Geng-Wei [2 ,3 ]
Chang, Ting-Chang [1 ,4 ]
Jhu, Jhe-Ciou [1 ,4 ]
Tsai, Tsung-Ming [5 ]
Syu, Yong-En [1 ,4 ]
Chang, Kuan-Chang [5 ]
Tai, Ya-Hsiang [2 ,3 ]
Jian, Fu-Yen [1 ,4 ]
Hung, Ya-Chi [5 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan
[2] Natl Chiao Tung Univ, Dept Photon, Hsinchu 300, Taiwan
[3] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 300, Taiwan
[4] Natl Sun Yat Sen Univ, Ctr Nanosci & Nanotechnol, Kaohsiung 804, Taiwan
[5] Natl Sun Yat Sen Univ, Inst Mat Sci & Engn, Kaohsiung 804, Taiwan
关键词
Indium-gallium-zinc-oxide (IGZO); temperature; thermal-induced hole; thin-film transistors (TFTs); ELECTRICAL-CONDUCTIVITY; PRESSURE; STRESS;
D O I
10.1109/LED.2012.2182754
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Abnormal subthreshold leakage current is observed at high temperature in amorphous InGaZnO thin-film transistors. The transfer curve exhibits an apparent subthreshold current stretch-out phenomenon that becomes more serious with increasing temperatures. The negative bias temperature instability experiment has been used to prove high-temperature-induced hole generation. Furthermore, the transfer characteristics with different drain voltages have been also used to confirm the status of hole accumulation. These pieces of evidence clearly defined the stretch-out phenomenon, which is caused by thermal-induced hole generation and accumulation at the source region that leads to source-side barrier lowering.
引用
收藏
页码:540 / 542
页数:3
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