Near-field scanning microwave microscope using a dielectric resonator

被引：31

作者：

Kim, J

Lee, K

Friedman, B

Cha, D

机构：

[1] Sogang Univ, Dept Phys, Seoul 121742, South Korea

[2] Sam Houston State Univ, Dept Phys, Huntsville, TX 77341 USA

[3] Kunsan Natl Univ, Dept Phys, Kunsan, South Korea

来源：

APPLIED PHYSICS LETTERS | 2003年 / 83卷 / 05期

关键词：

D O I：

10.1063/1.1597984

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We describe a near-field scanning microwave microscope which uses a high-quality dielectric resonator with a tunable screw. The operating frequency is f=4.5 GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator for the TE011 mode. We tuned the resonance cavity to match the impedance of 50 Omega by using a tunable screw and could improve sensitivity and spatial resolution to better than 1 mum. To demonstrate the ability of local microwave characterization, the surface resistance dependence of the metallic thin films on film thickness has been mapped. (C) 2003 American Institute of Physics.

引用

收藏

页码：1032 / 1034

页数：3

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