Improvement of InGaN-GaN light-emitting diode performance with a nano-roughened p-GaN surface

被引:94
作者
Huang, HW [1 ]
Kao, CC
Chu, JI
Kuo, HC
Wang, SC
Yu, CC
机构
[1] Natl Chiao Tung Univ, Dept Photon, Hsinchu 300, Taiwan
[2] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 300, Taiwan
[3] True Light Corp, Hsinchu 300, Taiwan
[4] Global Union Technol Corp, Hsinchu 300, Taiwan
关键词
gallium nitride (GaN); light-emitting diode (LED); nano-mask; nickel;
D O I
10.1109/LPT.2005.846741
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This investigation describes the development of InGaN-GaN light-emitting diode (LED) with a nano-roughened top p-GaN surface which uses Ni nano-mask and wet etching. The light output of the InGaN-GaN LED with a nano-roughened top p-GaN surface is 1.4 times that of a conventional LED, and wall-plug efficiency is 45% higher. The operating voltage of InGaN-GaN LED was reduced from 3.65 to 3.5 V at 20 mA and the series resistance was reduced by 20%. The light output is increased by the nano-roughening of the top p-GaN surface. The reduction in the series resistance can be attributed to the increase in the contact area of nano-roughened surface.
引用
收藏
页码:983 / 985
页数:3
相关论文
共 9 条
[1]   Nitride-based LEDs with 800 °C grown p-AllnGaN-GaN double-cap layers [J].
Chang, SJ ;
Wu, LW ;
Su, YK ;
Hsu, YP ;
Lai, WC ;
Tsai, JA ;
Sheu, JK ;
Lee, CT .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (06) :1447-1449
[2]   Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening [J].
Fujii, T ;
Gao, Y ;
Sharma, R ;
Hu, EL ;
DenBaars, SP ;
Nakamura, S .
APPLIED PHYSICS LETTERS, 2004, 84 (06) :855-857
[3]   Fabrication of GaN-based nanorod light emitting diodes using self-assemble nickel nano-mask and inductively coupled plasma reactive ion etching [J].
Huang, HW ;
Kao, CC ;
Hsueh, TH ;
Yu, CC ;
Lin, CF ;
Chu, JT ;
Kuo, HC ;
Wang, SC .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 113 (02) :125-129
[4]   Improved light-output and electrical performance of InGaN-based, light-emitting diode by microroughening of the p-GaN surface [J].
Huh, C ;
Lee, KS ;
Kang, EJ ;
Park, SJ .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (11) :9383-9385
[5]   Effects of surface treatments and metal work functions on electrical properties at p-GaN/metal interfaces [J].
Ishikawa, H ;
Kobayashi, S ;
Koide, Y ;
Yamasaki, S ;
Nagai, S ;
Umezaki, J ;
Koike, M ;
Murakami, M .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (03) :1315-1322
[6]   Effects of post-growth thermal annealing on the indium aggregated structures in InGaN/GaN quantum wells [J].
Lin, YS ;
Ma, KJ ;
Yang, CC ;
Weirich, TE .
JOURNAL OF CRYSTAL GROWTH, 2002, 242 (1-2) :35-40
[7]   Room-temperature continuous-wave operation of InGaN multi-quantum-well-structure laser diodes with a long lifetime [J].
Nakamura, S ;
Senoh, M ;
Nagahama, S ;
Iwasa, N ;
Yamada, T ;
Matsushita, T ;
Sugimoto, Y ;
Kiyoku, H .
APPLIED PHYSICS LETTERS, 1997, 70 (07) :868-870
[8]   III-nitride blue and ultraviolet photonic crystal light emitting diodes [J].
Oder, TN ;
Kim, KH ;
Lin, JY ;
Jiang, HX .
APPLIED PHYSICS LETTERS, 2004, 84 (04) :466-468
[9]   Influence of various activation temperatures on the optical degradation of Mg doped InGaN/GaN MQW blue LEDs [J].
Youn, CJ ;
Jeong, TS ;
Han, MS ;
Yang, JW ;
Lim, KY ;
Yu, HW .
JOURNAL OF CRYSTAL GROWTH, 2003, 250 (3-4) :331-338