Polarized Raman scattering and localized embedded strain in self-organized Si/Ge nanostructures

被引:21
作者
Kamenev, BV [1 ]
Grebel, H
Tsybeskov, L
Kamins, TI
Williams, RS
Baribeau, JM
Lockwood, DJ
机构
[1] New Jersey Inst Technol, Dept Elect & Comp Engn, Newark, NJ 07102 USA
[2] Hewlett Packard Labs, Quantum Sci Res, Palo Alto, CA 94304 USA
[3] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada
关键词
D O I
10.1063/1.1628403
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using polarized Raman spectroscopy, we examine different vibrational modes (i.e., Si-Si, Si-Ge, and Ge-Ge) in Si/Ge self-organized nanostructures. Here, we present unambiguous proof that multilayers of Ge nanometer-size, "dome-shaped" islands grown on a <100> Si substrate are nearly fully relaxed and that the built-in strain field is substantially localized in the surrounding Si matrix. In contrast, multilayers with "pyramid-shaped" islands do not show observable relaxation. The large strain in the Si layers of the multilayer dome samples correlates with the greater self-organization in these structures compared to the multilayer pyramid samples. (C) 2003 American Institute of Physics.
引用
收藏
页码:5035 / 5037
页数:3
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