Modification of a CMOS microelectrode array for a bioimpedance imaging system

被引：18

作者：

Chai, KTC ^{[1
]}

Hammond, PA ^{[1
]}

Cumming, DRS ^{[1
]}

机构：

[1] Univ Glasgow, Dept Elect & Elect Engn, Glasgow G12 8LT, Lanark, Scotland

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2005年 / 111卷

基金：

英国工程与自然科学研究理事会;

关键词：

bioimpedance; biocompatibility; CMOS; MEAs; electroless gold plating; sensors;

D O I：

10.1016/j.snb.2005.06.047

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A complete microsensor array with integrated circuitry, fabricated using a conventional complementary metal oxide semiconductor (CMOS) process is presented. This sensor array is the first step towards a system-on-chip design intended for making cellular impedance measurements in a tissue culture. The microelectrodes that make LIP the sensor array were passivated using a modified electroless gold plating process. The process plates a layer of gold onto the native aluminium electrodes so that they are suitable for performing the cellular impedance measurement experiment. Successful trials were achieved from the plating process with uniform plating coverage over all the exposed aluminium surfaces. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：305 / 309

页数：5

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