Evolution of hydrogen platelets in silicon determined by polarized Raman spectroscopy

Crystalline silicon treated in a remote hydrogen plasma exhibits {111} platelike defects. From polarized Raman spectroscopy, we identify two different hydrogen-related extended {111} defects, which exist simultaneously in the samples: an optically dense structure with epsilon congruent to 14 and a structure with epsilon congruent to 1 which, contains the H-2 molecules. The platelet with e congruent to 14 is assigned to agglomerated H-2* defects in a, (111) plane. At 100 degreesC, it transforms into the platelet with e congruent to 1, which is assigned to hydrogenated silicon (111) surfaces.