Nanometer-scale scanning sensors fabricated using stencil lithography

被引：44

作者：

Champagne, AR ^{[1
]}

Couture, AJ ^{[1
]}

Kuemmeth, F ^{[1
]}

Ralph, DC ^{[1
]}

机构：

[1] Cornell Univ, Atom & Solid State Phys Lab, Ithaca, NY 14853 USA

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 07期

关键词：

D O I：

10.1063/1.1554483

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We describe a flexible technique for fabricating 10-nm-scale devices for use as high-resolution scanning sensors and functional probes. Metallic structures are deposited directly onto atomic force microscope tips by evaporation through nanoscale holes fabricated in a stencil mask. We report on the lithographic capabilities of the technique and discuss progress in one initial application, to make high-spatial-resolution magnetic force sensors. (C) 2003 American Institute of Physics.

引用

页码：1111 / 1113

页数：3

共 21 条

[11] Optical antenna: Towards a unity efficiency near-field optical probe [J].

Grober, RD ;

Schoelkopf, RJ ;

Prober, DE .

APPLIED PHYSICS LETTERS, 1997, 70 (11) :1354-1356

[12] Scanning gate spectroscopy on nanoclusters [J].

Gurevich, L ;

Canali, L ;

Kouwenhoven, LP .

APPLIED PHYSICS LETTERS, 2000, 76 (03) :384-386

[13] Magnetic force microscopy [J].

Hartmann, U .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1999, 29 :53-87

[14] PIEZOELECTRIC TIP-SAMPLE DISTANCE CONTROL FOR NEAR-FIELD OPTICAL MICROSCOPES [J].

KARRAI, K ;

GROBER, RD .

APPLIED PHYSICS LETTERS, 1995, 66 (14) :1842-1844

[15] Comparison of magnetic images using point and thin-film magnetic force microscopy tips [J].

Liou, SH .

IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (05) :3989-3991

[16] Sub-attonewton force detection at millikelvin temperatures [J].

Mamin, HJ ;

Rugar, D .

APPLIED PHYSICS LETTERS, 2001, 79 (20) :3358-3360

[17] High resolution magnetic force microscopy using focused ion beam modified tips [J].

Phillips, GN ;

Siekman, M ;

Abelmann, L ;

Lodder, JC .

APPLIED PHYSICS LETTERS, 2002, 81 (05) :865-867

[18] FABRICATION OF THIN-FILM METAL NANOBRIDGES [J].

RALLS, KS ;

BUHRMAN, RA ;

TIBERIO, RC .

APPLIED PHYSICS LETTERS, 1989, 55 (23) :2459-2461

[19] Improved spatial resolution in magnetic force microscopy [J].

Skidmore, GD ;

DanDahlberg, E .

APPLIED PHYSICS LETTERS, 1997, 71 (22) :3293-3295

[20] Scanning single-electron transistor microscopy: Imaging individual charges [J].

Yoo, MJ ;

Fulton, TA ;

Hess, HF ;

Willett, RL ;

Dunkleberger, LN ;

Chichester, RJ ;

Pfeiffer, LN ;

West, KW .

SCIENCE, 1997, 276 (5312) :579-582

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