Fabrication of light-turning mirrors in buried-channel silica waveguides for monolithic and hybrid integration

被引：7

作者：

Bazylenko, MV

Gross, M

Gauja, E

Chu, PL

机构：

[1] School of Electrical Engineering, University of New South Wales, Sydney

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1997年 / 15卷 / 01期

基金：

澳大利亚研究理事会;

关键词：

D O I：

10.1109/50.552123

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A technique for incorporating a mirror into the core of a silica-based channel waveguide is described. Both up-reflecting mirrors for hybrid integration and down-reflecting mirrors for monolithic integration tan be fabricated using this technique. The proposed fabrication method is based on a combination of low-temperature hollow cathode PECVD for silica-based waveguide deposition and a novel technique for forming a reflecting facet by wet chemical etching of PECVD silica.

引用

收藏

页码：148 / 153

页数：6

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