Transmission and scanning electron microscopy studies of single femtosecond-laser-pulse ablation of silicon

被引：88

作者：

Borowiec, A ^{[1
]}

Mackenzie, M ^{[1
]}

Weatherly, GC ^{[1
]}

Haugen, HK ^{[1
]}

机构：

[1] McMaster Univ, Brockhouse Inst Mat Res, Hamilton, ON L8S 4M1, Canada

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 76卷 / 02期

关键词：

D O I：

10.1007/s003390201409

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The final state of the material resulting from laser irradiation of silicon using 130 fs pulses at 790 nm was studied using a number of techniques including scanning and transmission electron microscopies, as well as atomic force microscopy. Structural details and the level of damage to the nearby solid following irradiation were characterized and are discussed in the context of recent dynamical studies.

引用

页码：201 / 207

页数：7

共 35 条

[11] Ultrashort pulse laser ablation of silicon: an MD simulation study [J].

Herrmann, RFW ;

Gerlach, J ;

Campbell, EEB .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 66 (01) :35-42

[12] Expansion of matter heated by an ultrashort laser pulse [J].

Inogamov, NA ;

Petrov, YV ;

Anisimov, SI ;

Oparin, AM ;

Shaposhnikov, NV ;

von der Linde, D ;

Meyer-ter-Vehn, J .

JETP LETTERS, 1999, 69 (04) :310-316

[13]

Kelly A., 1986, STRONG SOLIDS

[14] Incubation of laser ablation in fused silica with 5-fs pulses [J].

Lenzner, M ;

Krüger, J ;

Kautek, W ;

Krausz, F .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (04) :465-466

[15] SIMPLE TECHNIQUE FOR MEASUREMENTS OF PULSED GAUSSIAN-BEAM SPOT SIZES [J].

LIU, JM .

OPTICS LETTERS, 1982, 7 (05) :196-198

[16] PICOSECOND LASER-INDUCED MELTING AND RESOLIDIFICATION MORPHOLOGY ON SI [J].

LIU, PL ;

YEN, R ;

BLOEMBERGEN, N ;

HODGSON, RT .

APPLIED PHYSICS LETTERS, 1979, 34 (12) :864-866

[17] Laser ablation and micromachining with ultrashort laser pulses [J].

Liu, X ;

Du, D ;

Mourou, G .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1997, 33 (10) :1706-1716

[18] Anomalous elastic response of silicon to uniaxial shock compression on nanosecond time scales [J].

Loveridge-Smith, A ;

Allen, A ;

Belak, J ;

Boehly, T ;

Hauer, A ;

Holian, B ;

Kalantar, D ;

Kyrala, G ;

Lee, RW ;

Lomdahl, P ;

Meyers, MA ;

Paisley, D ;

Pollaine, S ;

Remington, B ;

Swift, DC ;

Weber, S ;

Wark, JS .

PHYSICAL REVIEW LETTERS, 2001, 86 (11) :2349-2352

[19] Polarization effects in ultrashort-pulse laser drilling [J].

Nolte, S ;

Momma, C ;

Kamlage, G ;

Ostendorf, A ;

Fallnich, C ;

von Alvensleben, F ;

Welling, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 68 (05) :563-567

[20] Ablation of metals by ultrashort laser pulses [J].

Nolte, S ;

Momma, C ;

Jacobs, H ;

Tunnermann, A ;

Chichkov, BN ;

Wellegehausen, B ;

Welling, H .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1997, 14 (10) :2716-2722

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