Block copolymer patterns and templates

被引：199

作者：

Li, Mingqi

Ober, Christopher K.

机构：

[1] Rohm & Haas Elect Mat, Marlborough, MA 01752 USA

[2] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA

来源：

MATERIALS TODAY | 2006年 / 9卷 / 09期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/S1369-7021(06)71620-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This review describes the chemical and physical aspects of patternable block copolymers and their use for nanostructure fabrication. The patternability of block copolymers results from their ability to self-assemble into microdomains and the manipulation of these patterns by a variety of physical and chemical means. Procedures for achieving long-range lateral order, as well as orientation order of microdomain patterns, are discussed. The level of control that these strategies afford has enabled block copolymers to be used as templates for fabricating a variety of nanostructures.

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收藏

页码：30 / 39

页数：10

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