Atomic-Resolution Imaging with a Sub-50-pm Electron Probe

被引：355

作者：

Erni, Rolf ^{[1
]}

Rossell, Marta D. ^{[1
]}

Kisielowski, Christian ^{[1
]}

Dahmen, Ulrich ^{[1
]}

机构：

[1] Lawrence Berkeley Natl Lab, Natl Ctr Electron Microscopy, Berkeley, CA 94720 USA

来源：

PHYSICAL REVIEW LETTERS | 2009年 / 102卷 / 09期

关键词：

MICROSCOPE; CORRECTOR; STEM;

D O I：

10.1103/PhysRevLett.102.096101

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Using a highly coherent focused electron probe in a fifth-order aberration-corrected transmission electron microscope, we report on resolving a crystal spacing less than 50 pm. Based on the geometrical source size and residual coherent and incoherent axial lens aberrations, an electron probe is calculated, which is theoretically capable of resolving an ideal 47 pm spacing with 29% contrast. Our experimental data show the 47 pm spacing of a Ge < 114 > crystal imaged with 11%-18% contrast at a 60%-95% confidence level, providing the first direct evidence for sub-50-pm resolution in annular dark-field scanning transmission electron microscopy imaging.

引用

页数：4

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