Effect of pyrolysis temperature on preferential orientation and electrical properties of sol-gel derived lead zirconate titanate films

被引：59

作者：

Gong, W ^{[1
]}

Li, JF ^{[1
]}

Chu, XC ^{[1
]}

Li, LT ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2004年 / 24卷 / 10-11期

基金：

中国国家自然科学基金;

关键词：

dielectric properties; fatigue; ferroelectric properties; films; PZT;

D O I：

10.1016/j.jeurceramsoc.2003.10.007

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Lead zirconate titanate (PZT) films with composition near the morphotropic phase boundary were fabricated on Pt(1 11)/Ti/SiO2/Si(100) using sol-gel method, and the pyrolysis temperature effects on the preferential orientation and ferroelectric properties of PZT films were investigated. It has been found that the PZT films pyrolyzed at 450 degreesC and then annealed at 650 degreesC shown a dominated (100) orientation, whereas the pyrolysis treatment at lower or higher temperatures favored the (111) orientation. Different pyrolysis temperatures also lead to differences in electrical properties, including dielectric constant, polarization values, leakage current and fatigue behavior. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：2977 / 2982

页数：6

共 23 条

[1] Preparation of PZT, PLZT and Bi4Ti3O12 thin films from oxide precursors [J].