Demonstration of large active area AlGaN solar-blind Schottky photodiodes with low dark current
被引:5
作者:
Jiang, H.
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Nagoya Inst Technol, Res Ctr Nano Devices & Syst, Showa Ku, Nagoya, Aichi 4668555, JapanNagoya Inst Technol, Res Ctr Nano Devices & Syst, Showa Ku, Nagoya, Aichi 4668555, Japan
Jiang, H.
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机构:
Egawa, T.
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机构:
[1] Nagoya Inst Technol, Res Ctr Nano Devices & Syst, Showa Ku, Nagoya, Aichi 4668555, Japan
Solar-blind AlGaN Schottky photodiodes with a large active area of 2 x 2 mm have been fabricated on a AIN/sapphire template. The resulting devices show dark current density as low as 6.6 x 10(-11) A at -5 V bias. A zero-bias peak responsivity of 38 mA/W was obtained at 260 nm, corresponding to. an estimated detectivity of 1.2 x 10(14) cm Hz(1/2) W-1.