Influence of target morphology on droplet emission and thickness profiles with pulsed laser deposited bismuth films

被引：15

作者：

Jacquot, A ^{[1
]}

Lenoir, B ^{[1
]}

Boffoué, MO ^{[1
]}

Dauscher, A ^{[1
]}

机构：

[1] Ecole Mines, UMR CNRS UHP INPL 7556, Phys Mat Lab, F-54042 Nancy, France

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷

关键词：

D O I：

10.1007/s003390051383

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The influence of target morphology on the density of droplets and on thickness profiles was studied on thin bismuth films prepared by pulsed laser deposition. Films were deposited at room temperature on glass substrates from a Nd:YAG laser working at a wavelength of 532 nm. Two parameters were taken into account: the target diameter and the method of scanning the laser beam on the target. Three different laser beam scans have been simulated and tested afterwards. The quality of the films, as determined by scanning electron microscopy, can be improved by working with large targets and with appropriate scanning of the laser beam.

引用

页码：S195 / S199

页数：5

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