Orientation of CuGaS2 thin films on (100) GaAs and GaP substrates

被引:21
作者
Oishi, K
Kobayashi, S
Ohta, S
Tsuboi, N
Kaneko, F
机构
[1] NIIGATA UNIV,FAC ENGN,IKARASHI,NIIGATA 95021,JAPAN
[2] NIPPON SEIKI CO LTD,ELECT TECH DIV,NAGAOKA,NIIGATA 940,JAPAN
关键词
D O I
10.1016/S0022-0248(96)00796-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
CuGaS2 films have been groan on (100) GaAs and GaP wafers by the vacuum evaporation technique using constituent elementary substances as sources. RHEED patterns of the films that use [011] azimuths in a substrate show two different patterns in mutually orthogonal directions, In one direction, the observed pattern is a single pattern which illustrates that CuGaS2 grows in the [001] orientation direction (the c-axis growth). In another direction, however, additional patterns appeared. This phenomenon indicates that one pair of the 180 degrees rotated {112} twins exist in addition to c-axis growth in a film, and it also indicates that additional orientations except fur c-axis growth are reduced in films grown on compound substrates as compared with ones on (100) Si.
引用
收藏
页码:88 / 94
页数:7
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