Controllable excimer-laser fabrication of conical nano-tips on silicon thin films

被引：41

作者：

Georgiev, DG ^{[1
]}

Baird, RJ

Avrutsky, I

Auner, G

Newaz, G

机构：

[1] Wayne State Univ, Dept Elect & Comp Engn, Detroit, MI 48202 USA

[2] Wayne State Univ, Dept Mech Engn, Detroit, MI 48202 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 84卷 / 24期

关键词：

D O I：

10.1063/1.1762978

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have found conditions for the reproducible, direct laser fabrication of sharp conical tips with heights of about 1 mum and apical radii of curvature of several tens of nanometers. An individual cone is formed when single-crystalline silicon on a silica substrate is irradiated with a single pulse from a KrF excimer laser, homogenized and shaped to a circular spot several microns in diameter. Atomic force microscopy and field-emission scanning electron microscopy were used to characterize these structures. A simple mechanism of formation based on movement of melted material is proposed. Our results suggest that this technique could produce even smaller structures by optimizing the laser processing geometry. (C) 2004 American Institute of Physics.

引用

页码：4881 / 4883

页数：3

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