Accuracy of beam positioning in TIARA

被引：12

作者：

Kamiya, T

Sakai, T

Hamano, T

Suda, T

Hirao, T

机构：

[1] Japan Atom. Ener. Research Institute, Takasaki, Gunma

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1997年 / 130卷 / 1-4期

关键词：

D O I：

10.1016/S0168-583X(97)00221-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A beam scanning and target profiling technique that provides precise and easy beam positioning on samples has been established for the light ion and heavy ion microbeam systems in TIARA of JAERI. The beam positioning accuracy in these systems was measured using nuclear track detectors, CR-39's. The beam positioning accuracy and indirect beam positioning technique in the heavy ion microbeam system enabled extremely low current microbeam to hit targeted virgin points in micro-structure semiconductor test samples for study of single event upset (SEU) transient current properties. This paper gives details of the beam scanning and target profiling system, and describes and discusses the experiments by using this system. (C) 1997 Elsevier Science B.V.

引用

收藏

页码：285 / 288

页数：4

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