Surfactant controlled growth of GaInP by organometallic vapor phase epitaxy

被引:29
作者
Lee, RT [1 ]
Shurtleff, JK
Fetzer, CM
Stringfellow, GB
Lee, S
Seong, TY
机构
[1] Univ Utah, Dept Mat Sci & Engn, Salt Lake City, UT 84112 USA
[2] Kwangiu Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju 506712, South Korea
关键词
D O I
10.1063/1.372408
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effect of the surfactant Sb has been studied for GaInP semiconductor alloys grown by organometallic vapor phase epitaxy. Dramatic changes in the optical and electrical properties of GaInP with CuPt ordering have been observed. A small concentration of triethylantimony (TESb) in the vapor is found to cause Sb to accumulate at the surface. In situ surface photoabsorption analysis indicates that Sb changes the surface bonding by replacing the [(1) over bar 10] P dimers that are responsible for the formation of the CuPt structure during growth with [(1) over bar 10] Sb dimers. As a result, the degree of order for the GaInP layers is decreased, as shown by transmission electron diffraction studies. The 20 K photoluminescence spectra show a 131 meV peak energy increase for GaInP layers grown on vicinal substrates when a small amount of Sb [Sb/P(v)=4x10(-4)] is added to the system during growth. The use of surfactants to control specific properties of materials is expected to be a powerful tool for producing complex structures. In this article, the growth of heterostructures by modulating the Sb concentration in the vapor is demonstrated. (C) 2000 American Institute of Physics. [S0021-8979(00)05008-8].
引用
收藏
页码:3730 / 3735
页数:6
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