Measurements of stiff-material compliance on the nanoscale using ultrasonic force microscopy

被引:67
作者
Dinelli, F
Biswas, SK
Briggs, GAD
Kolosov, OV
机构
[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[2] Indian Inst Sci, Bangalore 560012, Karnataka, India
关键词
D O I
10.1103/PhysRevB.61.13995
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ultrasonic farce microscopy (UFM) was introduced to probe nanoscale mechanical properties of stiff materials. This was achieved by vibrating the sample far above the first resonance of the probing atomic force microscope cantilever where the cantilever becomes dynamically rigid. By operating UFM at different set force values, it is possible to directly measure the absolute values of the tip-surface contact stiffness. From this an evaluation of surface elastic properties can be carried out assuming a suitable solid-solid contact model. In this paper we present curves of stiffness as a function of the normal load in the range of 0-300 nN. The dependence of stiffness on the relative humidity has also been investigated. Materials with different elastic constants (such as sapphire lithium fluoride, and silicon) have been successfully differentiated. Continuum mechanics models cannot however explain the dependence of stiffness on the normal force and on the relative humidity. In this high-frequency regime, it is likely that viscous forces might play an important role modifying the tip-surface interaction. Plastic deformation might also occur due to the high strain rates applied when ultrasonically vibrating the sample. Another possible cause of these discrepancies might be the presence of water in between the two bodies in contact organizing in a solidlike way and partially sustaining the load.
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收藏
页码:13995 / 14006
页数:12
相关论文
共 41 条
[31]   HARDNESS MEASUREMENT AT PENETRATION DEPTHS AS SMALL AS 20-NM [J].
PETHICA, JB ;
HUTCHINGS, R ;
OLIVER, WC .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1983, 48 (04) :593-606
[32]  
PETHICA JB, 1989, MRS S P, V130
[33]   ON THE GENERALITY OF THE RELATIONSHIP AMONG CONTACT STIFFNESS, CONTACT AREA, AND ELASTIC-MODULUS DURING INDENTATION [J].
PHARR, GM ;
OLIVER, WC ;
BROTZEN, FR .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (03) :613-617
[34]  
RABE U, 1994, ANN PHYS-LEIPZIG, V3, P589, DOI 10.1002/andp.19945060704
[35]   Vibrations of free and surface-coupled atomic force microscope cantilevers: Theory and experiment [J].
Rabe, U ;
Janser, K ;
Arnold, W .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (09) :3281-3293
[36]   IMAGING VISCOELASTICITY BY FORCE MODULATION WITH THE ATOMIC FORCE MICROSCOPE [J].
RADMACHER, M ;
TILMANN, RW ;
GAUB, HE .
BIOPHYSICAL JOURNAL, 1993, 64 (03) :735-742
[37]  
Rohrbeck W., 1992, Physica Status Solidi A, V131, P69, DOI 10.1002/pssa.2211310111
[38]   ATOMIC FORCE MICROSCOPY [J].
RUGAR, D ;
HANSMA, P .
PHYSICS TODAY, 1990, 43 (10) :23-30
[39]   FORCES IN ATOMIC FORCE MICROSCOPY IN AIR AND WATER [J].
WEISENHORN, AL ;
HANSMA, PK ;
ALBRECHT, TR ;
QUATE, CF .
APPLIED PHYSICS LETTERS, 1989, 54 (26) :2651-2653
[40]   ANALYSIS OF SUBSURFACE IMAGING AND EFFECT OF CONTACT ELASTICITY IN THE ULTRASONIC FORCE MICROSCOPE [J].
YAMANAKA, K ;
OGISO, H ;
KOLOSOV, O .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (5B) :3197-3203