Self-organized quantum dots and quantum dot lasers (invited)

被引:38
作者
Ishikawa, H [1 ]
Shoji, H [1 ]
Nakata, Y [1 ]
Mukai, K [1 ]
Sugawara, M [1 ]
Egawa, M [1 ]
Otsuka, N [1 ]
Sugiyama, Y [1 ]
Futatsugi, T [1 ]
Yokoyama, N [1 ]
机构
[1] Fujitsu Labs Ltd, Atsugi, Kanagawa 24301, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1998年 / 16卷 / 02期
关键词
D O I
10.1116/1.581060
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The growth and characterization of two types of self-organized quantum dots, Stranski-Krastanow (S-K) mode grown quantum dots and atomic layer epitaxy (ALE) grown quantum dots, are described. In the S-K mode growth, molecular beam epitaxy has been used. Multilayer stacked structures have been fabricated. S-K mode grown quantum dots showed the ground state photoluminescence (PL) emission wavelength of 1.14 mu m and the full width at half maximum of the emission linewidth of 80 meV. ALE mode grown quantum dots are fabricated using metalorganic chemical vapor deposition. A smaller PL linewidth of 40 meV, indicating a higher uniformity in the size and composition of quantum dots, and a room temperature emission at 1.3 mu m were obtained. Continuous wave lasing at the ground state at room temperature was achieved with a S-K mode frown quantum dot laser owing to the high dot density enabled by the stacked dot layer structure. Because of the low density of dots, lasing was at 80 K at the higher order sublevel in ALE grown quantum dot lasers. Based on these experimental results, we discuss the key issues involved in these fabrication technologies and the carrier dynamics to achieve the ideal performance for quantum dot lasers. (C) 1998 American Vacuum Society. [S0734-2101(98)04902-1].
引用
收藏
页码:794 / 800
页数:7
相关论文
共 28 条
  • [1] PHOTOLUMINESCENCE AND ELECTROLUMINESCENCE OF SIGE DOTS FABRICATED ISLAND GROWTH
    APETZ, R
    VESCAN, L
    HARTMANN, A
    DIEKER, C
    LUTH, H
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (04) : 445 - 447
  • [2] MULTIDIMENSIONAL QUANTUM WELL LASER AND TEMPERATURE-DEPENDENCE OF ITS THRESHOLD CURRENT
    ARAKAWA, Y
    SAKAKI, H
    [J]. APPLIED PHYSICS LETTERS, 1982, 40 (11) : 939 - 941
  • [3] INTRINSIC MECHANISM FOR THE POOR LUMINESCENCE PROPERTIES OF QUANTUM-BOX SYSTEMS
    BENISTY, H
    SOTOMAYORTORRES, CM
    WEISBUCH, C
    [J]. PHYSICAL REVIEW B, 1991, 44 (19) : 10945 - 10948
  • [4] BIMBERG D, 1995 INT C SOL STAT, P716
  • [5] EXCITON RELAXATION AND RADIATIVE RECOMBINATION IN SEMICONDUCTOR QUANTUM DOTS
    BOCKELMANN, U
    [J]. PHYSICAL REVIEW B, 1993, 48 (23): : 17637 - 17640
  • [6] ELECTRON RELAXATION IN QUANTUM DOTS BY MEANS OF AUGER PROCESSES
    BOCKELMANN, U
    EGELER, T
    [J]. PHYSICAL REVIEW B, 1992, 46 (23): : 15574 - 15577
  • [7] PHONON-SCATTERING AND ENERGY RELAXATION IN 2-DIMENSIONAL, ONE-DIMENSIONAL, AND ZERO-DIMENSIONAL ELECTRON GASES
    BOCKELMANN, U
    BASTARD, G
    [J]. PHYSICAL REVIEW B, 1990, 42 (14): : 8947 - 8951
  • [8] DISLOCATION-FREE STRANSKI-KRASTANOW GROWTH OF GE ON SI(100)
    EAGLESHAM, DJ
    CERULLO, M
    [J]. PHYSICAL REVIEW LETTERS, 1990, 64 (16) : 1943 - 1946
  • [9] Temperature effects on the radiative recombination in self-assembled quantum dots
    Fafard, S
    Raymond, S
    Wang, G
    Leon, R
    Leonard, D
    Charbonneau, S
    Merz, JL
    Petroff, PM
    Bowers, JE
    [J]. SURFACE SCIENCE, 1996, 361 (1-3) : 778 - 782
  • [10] Fafard S, 1996, APPL PHYS LETT, V68, P991, DOI 10.1063/1.116122