Test structure for SPM tip shape deconvolution

被引：72

作者：

Bykov, V ^{[1
]}

Gologanov, A ^{[1
]}

Shevyakov, V ^{[1
]}

机构：

[1] State Res Inst Phys Problems, NT, MDT, Moscow 103460, Russia

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1998年 / 66卷 / 05期

关键词：

D O I：

10.1007/s003390050703

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A test structure for SPM cantilever tip shape deconvolution is described. It consists of a silicon mono-crystalline wafer and an array of silicon sharp tips on its surface. Different types of tip shapes are observed with this structure. Images of the cantilever tip before and after contact-mode scanning are compared. Experimental studies of the developed test structure containing an array of sharp tips indicate that it allows three-dimensional images of the scanning tip to be obtained.

引用

页码：499 / 502

页数：4

共 17 条

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