Microscale characterization of mechanical properties

被引:229
作者
Hemker, K. J. [1 ]
Sharpe, W. N., Jr. [1 ]
机构
[1] Johns Hopkins Univ, Dept Mech Engn, Baltimore, MD 21218 USA
关键词
size effects; microtensile testing; Young's modulus; strength; microelectromechanical systems (MEMS); experimental techniques; high temperature;
D O I
10.1146/annurev.matsci.36.062705.134551
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Lilliputian techniques for measuring the mechanical response of microscale specimens are being developed to characterize the performance and reliability of microelectromechanical systems (MEMS) and other small-scale entities. The challenges associated with the preparation, handling, and testing of small volumes of material have spawned a variety of techniques; this review focuses on uniaxial testing. Results from these experiments provide valuable insight into size-scale effects on the elastic, brittle, and ductile behavior of micron-sized structures. Fundamental elastic interactions show no size effect; in-plane moduli can be predicted from anisotropic elastic constants if crystallographic texture is properly considered. Intrinsic fracture toughness is also size independent, although the fracture strength of brittle MEMS materials is extremely dependent on flaw size and distribution. By contrast, size effects on the strength of ductile materials suggest that the operation of intrinsic dislocation processes in greatly reduced or confined volumes alters their generation, multiplication, interaction, and motion.
引用
收藏
页码:93 / 126
页数:34
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