Energy-band diagram of metal/Lu2O3/silicon structures

被引:54
作者
Seguini, G [1 ]
Bonera, E [1 ]
Spiga, S [1 ]
Scarel, G [1 ]
Fanciulli, M [1 ]
机构
[1] INFM, Lab Nazl MDM, I-20041 Agrate Brianza, MI, Italy
关键词
D O I
10.1063/1.1828600
中图分类号
O59 [应用物理学];
学科分类号
摘要
Internal photoemission spectroscopy has been used to determine the band alignment in Lu2O3 based metal-oxide-semiconductor structures. The Si/Lu2O3 interface conduction- and valence-band offsets were determined to be 2.1+/-0.1 and 2.6+/-0.1 eV, respectively. The energy barrier for electrons at the Al/Lu2O3 interface is 2.4+/-0.1 eV. The value of the Lu2O3 transport band gap, obtained by photoconductivity measurements, was found to be 5.8+/-0.1 eV. Optical absorption spectroscopy gave a value of 4.89+/-0.02 eV for the Lu2O3 optical band gap. (C) 2004 American Institute of Physics.
引用
收藏
页码:5316 / 5318
页数:3
相关论文
共 13 条
[1]   INTERNAL PHOTOEMISSION SPECTROSCOPY OF SEMICONDUCTOR-INSULATOR INTERFACES [J].
ADAMCHUK, VK ;
AFANAS'EV, VV .
PROGRESS IN SURFACE SCIENCE, 1992, 41 (02) :111-211
[2]   Energy band alignment at the (100)Ge/HfO2 interface [J].
Afanas'ev, VV ;
Stesmans, S .
APPLIED PHYSICS LETTERS, 2004, 84 (13) :2319-2321
[3]   Internal photoemission of electrons and holes from (100)Si into HfO2 [J].
Afanas'ev, VV ;
Stesmans, A ;
Chen, F ;
Shi, X ;
Campbell, SA .
APPLIED PHYSICS LETTERS, 2002, 81 (06) :1053-1055
[4]   Electron energy barriers between (100)Si and ultrathin stacks of SiO2, Al2O3, and ZrO2 insulators [J].
Afanas'ev, VV ;
Houssa, M ;
Stesmans, A ;
Heyns, MM .
APPLIED PHYSICS LETTERS, 2001, 78 (20) :3073-3075
[5]   PHOTOEMISSION MEASUREMENTS OF INTERFACE BARRIER ENERGIES FOR TUNNEL OXIDES ON SILICON [J].
DRESSENDORFER, PV ;
BARKER, RC .
APPLIED PHYSICS LETTERS, 1980, 36 (11) :933-935
[6]   Structure and stability of rare-earth and transition-metal oxides [J].
Marsella, L ;
Fiorentini, V .
PHYSICAL REVIEW B, 2004, 69 (17) :172103-1
[7]   Chemical and electronic structures of Lu2O3/Si interfacial transition layer [J].
Nohira, H ;
Shiraishi, T ;
Nakamura, T ;
Takahashi, K ;
Takeda, M ;
Ohmi, S ;
Iwai, H ;
Hattori, T .
APPLIED SURFACE SCIENCE, 2003, 216 (1-4) :234-238
[9]   Band offsets of wide-band-gap oxides and implications for future electronic devices [J].
Robertson, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (03) :1785-1791
[10]   Atomic-layer deposition of Lu2O3 [J].
Scarel, G ;
Bonera, E ;
Wiemer, C ;
Tallarida, G ;
Spiga, S ;
Fanciulli, M ;
Fedushkin, IL ;
Schumann, H ;
Lebedinskii, Y ;
Zenkevich, A .
APPLIED PHYSICS LETTERS, 2004, 85 (04) :630-632