Dynamic behaviour of the systems Be-C, Be-W and C-W

被引:7
作者
Eckstein, W [1 ]
机构
[1] Max Planck Inst Plasmaphys, D-85748 Munich, Germany
关键词
D O I
10.1016/S0022-3115(00)00189-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The Monte Carlo program TRIDYN is applied to investigate the dynamic behaviour of the binary systems Be-C, Be-W and C-W, where one species represents the bombarding atom and the other the target atom. The fluence dependence of the particle reflection coefficient. of the sputtering yield, of the target composition, and of implantation values is calculated for incident energies between 300 eV and 10 keV (in a few cases up to 1 MeV) and for various angles of incidence. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:195 / 202
页数:8
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