Resonant-cavity separate absorption, charge and multiplication avalanche photodiodes with high-speed and high gain-bandwidth product

被引:56
作者
Nie, H [1 ]
Anselm, KA [1 ]
Lenox, C [1 ]
Yuan, P [1 ]
Hu, C [1 ]
Kinsey, G [1 ]
Streetman, BG [1 ]
机构
[1] Univ Texas, Microelect Res Ctr, Dept Elect & Comp Engn, Austin, TX 78712 USA
基金
美国国家科学基金会;
关键词
avalanche photodiodes; bandwidth;
D O I
10.1109/68.661426
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Previously, it has been shown that resonant-cavity separate-absorption-and-multiplication (SAM) avalanche photodiodes (APD's) exhibit high-speed and high gain-bandwidth products, In this letter, we describe a resonant-cavity SAM APD with an additional charge layer that provides better control of the electric field profile, These devices have achieved bandwidths as high as 33 GHz in the low-gain regime and a record gain-bandwidth product of 290 GHz, We also describe the correlation between the gain-bandwidth product and the doping level in the charge layer, With width-dependent ionization coefficients, the current versus voltage (I-V) and gain-bandwidth simulations agree well with the measured results, and indicate that even higher gain-bandwidth should be achievable with an optimized SACM APD structure.
引用
收藏
页码:409 / 411
页数:3
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