Bipolar Resistive Switching Characteristics of Transparent Indium Gallium Zinc Oxide Resistive Random Access Memory

被引:106
作者
Chen, Min-Chen [1 ]
Chang, Ting-Chang [1 ,2 ]
Huang, Sheng-Yao [1 ]
Chen, Shih-Ching [1 ]
Hu, Chih-Wei [3 ,4 ]
Tsai, Chih-Tsung [1 ]
Sze, Simon M. [3 ,4 ]
机构
[1] Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan
[2] Natl Sun Yat Sen Univ, Ctr Nanosci & Nanotechnol, Kaohsiung 804, Taiwan
[3] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 300, Taiwan
[4] Natl Chiao Tung Univ, Inst Elect, Hsinchu 300, Taiwan
关键词
D O I
10.1149/1.3360181
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
This study investigates a sputtered InGaZnO (IGZO) thin film to apply into a resistive random access memory device. After the formation of an indium tin oxide (ITO)/IGZO/ITO structure at room temperature, the device exhibits a repeatable bipolar resistance switching behavior without an electroforming process and an excellent transmittance in the visible region. The conduction mechanisms for low and high resistance states are dominated by Ohm's law and space-charge-limited current behavior, respectively. In retention and endurance tests, a resistance ratio of more than 1 order remains after 10(4) s at 90 degrees C and after 100 dc voltage sweeping cycles. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3360181] All rights reserved.
引用
收藏
页码:II191 / II193
页数:3
相关论文
共 20 条
[1]  
[Anonymous], 2009, IEEE ELECT DEVICE LE
[2]   Highly scalable non-volatile resistive memory using simple binary oxide driven by asymmetric unipolar voltage pulses [J].
Baek, IG ;
Lee, MS ;
Seo, S ;
Lee, MJ ;
Seo, DH ;
Suh, DS ;
Park, JC ;
Park, SO ;
Kim, HS ;
Yoo, IK ;
Chung, UI ;
Moon, JT .
IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST, 2004, :587-590
[3]   Unipolar resistive switching characteristics of ZnO thin films for nonvolatile memory applications [J].
Chang, Wen-Yuan ;
Lai, Yen-Chao ;
Wu, Tai-Bor ;
Wang, Sea-Fue ;
Chen, Frederick ;
Tsai, Ming-Jinn .
APPLIED PHYSICS LETTERS, 2008, 92 (02)
[4]   Inkjet-printed InGaZnO thin film transistor [J].
Kim, Gun Hee ;
Kim, Hyun Soo ;
Shin, Hyun Soo ;
Ahn, Byun Du ;
Kim, Kyung Ho ;
Kim, Hyun Jae .
THIN SOLID FILMS, 2009, 517 (14) :4007-4010
[5]   Anode-interface localized filamentary mechanism in resistive switching of TiO2 thin films [J].
Kim, Kyung Min ;
Choi, Byung Joon ;
Shin, Yong Cheol ;
Choi, Seol ;
Hwang, Cheol Seong .
APPLIED PHYSICS LETTERS, 2007, 91 (01)
[6]   High-performance indium gallium zinc oxide transparent thin-film transistors fabricated by radio-frequency sputtering [J].
Lim, Wantae ;
Kim, SeonHoo ;
Wang, Yu-Lin ;
Lee, J. W. ;
Norton, D. P. ;
Pearton, S. J. ;
Ren, F. ;
Kravchenko, I. I. .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 155 (06) :H383-H385
[7]   Electric-pulse-induced reversible resistance change effect in magnetoresistive films [J].
Liu, SQ ;
Wu, NJ ;
Ignatiev, A .
APPLIED PHYSICS LETTERS, 2000, 76 (19) :2749-2751
[8]   Materials science - Who wins the nonvolatile memory race? [J].
Meijer, G. I. .
SCIENCE, 2008, 319 (5870) :1625-1626
[9]   High field-effect mobility amorphous InGaZnO transistors with aluminum electrodes [J].
Na, Jong H. ;
Kitamura, M. ;
Arakawa, Y. .
APPLIED PHYSICS LETTERS, 2008, 93 (06)
[10]   Transparent resistive random access memory and its characteristics for nonvolatile resistive switching [J].
Seo, Jung Won ;
Park, Jae-Woo ;
Lim, Keong Su ;
Yang, Ji-Hwan ;
Kang, Sang Jung .
APPLIED PHYSICS LETTERS, 2008, 93 (22)