Negative bias temperature instability: What do we understand?

被引:276
作者
Schroder, Dieter K. [1 ]
机构
[1] Arizona State Univ, Dept Elect Engn, Tempe, AZ 85287 USA
[2] Arizona State Univ, Ctr Solid State Elect Res, Tempe, AZ 85287 USA
关键词
D O I
10.1016/j.microrel.2006.10.006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a brief overview of negative bias temperature instability (NBTI) commonly observed for in p-channel metal-oxide-semiconductor field-effect transistors (MOSFETs) when stressed with negative gate voltages at elevated temperatures and discuss the results of such stress on device and circuit performance and review interface traps and oxide charges, their origin, present understanding, and changes due to NBTL Next we discuss some of the models that have been proposed for both NBTI degradation and recovery and p- versus n-MOSFETs. We also address the time and energy dependence effects of NBTI and crystal orientation. Finally we mention some aspect of circuit degradation. The general conclusion is that although we understand much about NBTL several aspects are poorly understood. This may be due to a lack of a basic understanding or due to varying experimental data that are likely the result of sample preparation and measurement conditions. (c) 2006 Published by Elsevier Ltd.
引用
收藏
页码:841 / 852
页数:12
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