Observation of the size-dependent blueshifted electroluminescence from nanocrystalline Si fabricated by KrF excimer laser annealing of hydrogenated amorphous silicon amorphous-SiNx:H superlattices

被引：67

作者：

Wang, MX

Huang, XF

Xu, J

Li, W

Liu, ZG

Chen, KJ ^{[1
]}

机构：

[1] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China

[2] Nanjing Univ, State Key Lab Solid State Microstruct, Nanjing 210093, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 06期

关键词：

D O I：

10.1063/1.120857

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nanocrystalline silicon (nc-Si) was fabricated by KrF excimer laser annealing of hydrogenated amorphous silicon/amorphous-SiNx:H superlattices, A stable and reproducible electroluminescence (EL) based on these structures was observed at room temperature. it was found that the EL peak was significantly blueshifted from 780 to 600 nm with decreasing the a-Si:H sublayer thickness from 4.0 to 1.0 nm, while the intensity was also notably enhanced, The results suggest that the quantum confinement effect may play an essential role in visible light emissions from our present samples. (C) 1998 American Institute of Physics.

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页码：722 / 724

页数：3

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