Contribution of substrate to converse piezoelectric response of constrained thin films

被引：28

作者：

Chen, L ^{[1
]}

Li, JH ^{[1
]}

Slutsker, J ^{[1
]}

Ouyang, J ^{[1
]}

Roytburd, AL ^{[1
]}

机构：

[1] Univ Maryland, Dept Mat Sci & Engn, Mat Res Sci & Engn Ctr, College Pk, MD 20742 USA

来源：

JOURNAL OF MATERIALS RESEARCH | 2004年 / 19卷 / 10期

关键词：

D O I：

10.1557/jmr.2004.0367

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The converse piezoelectric response of a thin film constrained by a substrate is analyzed in different geometries under various boundary conditions. We consider the effects of elastic deformation of the substrate on the total displacement of the film surface induced by the electric field. The change of film thickness and the bending curvature of a film/substrate couple are calculated. For a thin film island clamped on a large thick substrate, the theoretical estimation of the piezoresponse, including a local bending in the vicinity of the island/substrate interface, is in agreement with the finite element calculation.

引用

页码：2853 / 2858

页数：6

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